{"id":2239,"date":"2026-03-11T10:40:46","date_gmt":"2026-03-11T15:40:46","guid":{"rendered":"https:\/\/faculty.eng.ufl.edu\/quanta\/?page_id=2239"},"modified":"2026-03-20T15:30:15","modified_gmt":"2026-03-20T20:30:15","slug":"mems-devices-for-harsh-environments","status":"publish","type":"page","link":"https:\/\/faculty.eng.ufl.edu\/quanta\/research\/mems-devices-for-harsh-environments\/","title":{"rendered":"MEMS devices for Harsh Environments"},"content":{"rendered":"\n
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Overview<\/strong><\/p>\n\n\n\n

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My research focuses on developing and understanding MEMS devices capable of operating in extreme environments. In particular, I study piezoelectric MEMS resonators, microphones, and pressure sensors based on AlN and AlScN materials. These platforms offer strong electromechanical coupling, thermal stability, and scalability, making them promising candidates for sensing and signal-processing technologies in harsh environments where conventional electronic systems cannot operate reliably.<\/p>\n\n\n\n

A key aspect of my work is investigating the electrical, mechanical, and piezoelectric behavior of these devices across a wide temperature range, from room temperature up to 1000 \u00b0C. Understanding device performance under such conditions is essential for enabling sensing technologies in aerospace propulsion systems, energy infrastructure, and high-temperature industrial environments.<\/p>\n\n\n\n

My research combines advanced electrical and optical characterization techniques to probe device performance and underlying physical mechanisms in addition to identifying the performance limiting parameters. I use network analyzers, spectrum analyzers, semiconductor parameter analyzers, and P\u2013E loop analyzers to study electrical and piezoelectric properties, while optical interferometry is employed to measure nanoscale mechanical displacements and vibrational modes in MEMS structures.<\/p>\n\n\n\n

In addition to experimental characterization, I contribute to the design, fabrication, and modeling of MEMS devices. This includes layout design using Python-based GDS tools and multiphysics simulations using COMSOL to study electromechanical coupling and optimize device performance.<\/p>\n\n\n\n

At the University of Florida, I developed an optical interferometry setup to implement reciprocal calibration methods for dynamic pressure sensors, enabling precise characterization of MEMS sensing performance in a wide frequency range. I have also performed electrical characterization of SiC capacitors and JFETs fabricated by the NASA Glenn Research Center for high-temperature electronics. These efforts contribute to advancing reliable sensing and electronic systems for extreme operating environments.<\/p>\n<\/div><\/div>\n\n\n\n

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Related Papers:<\/h3>\n\n\n\n
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Lithium Niobate Acoustic Resonators Operating Beyond 900\u00b0C<\/a><\/span><\/strong><\/p>\n\n\n\n

The fundamental shear-horizontal\u00a0SH0<\/sub> mode Leaky Surface Acoustic Wave (LSAW) resonators on X-cut lithium niobate leveraging dense and robust electrodes such as gold and tungsten are demonstrated for extreme temperature operation in harsh environments. Devices exhibit stable performance throughout multiple thermal cycles up to 1000 \u00b0C, with an extrapolated electromechanical coupling coefficient =25% and loaded quality factor Qp<\/sub>=12 at 1000 \u00b0C for tungsten devices, and =17%, Qp<\/sub>=100 at 900 \u00b0C for gold devices.<\/p>\n<\/div>\n\n\n\n

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References:<\/h3>\n\n\n\n