{"id":2013,"date":"2026-03-10T13:18:10","date_gmt":"2026-03-10T18:18:10","guid":{"rendered":"https:\/\/faculty.eng.ufl.edu\/quanta\/?page_id=2013"},"modified":"2026-03-23T11:57:26","modified_gmt":"2026-03-23T16:57:26","slug":"engineering-dissipation-dynamics-for-enhanced-q-factor","status":"publish","type":"page","link":"https:\/\/faculty.eng.ufl.edu\/quanta\/research\/engineering-dissipation-dynamics-for-enhanced-q-factor\/","title":{"rendered":"Engineering Dissipation Dynamics for Enhanced Q Factor"},"content":{"rendered":"\n<div style=\"height:50px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<div class=\"wp-block-group has-blue-background-color has-background\"><div class=\"wp-block-group__inner-container is-layout-constrained wp-block-group-is-layout-constrained\">\n<p class=\"has-text-align-center has-x-large-font-size\"><strong>Overview<\/strong><\/p>\n\n\n\n<hr class=\"wp-block-separator has-text-color has-white-color has-alpha-channel-opacity has-white-background-color has-background is-style-wide\" \/>\n\n\n\n<p class=\"has-text-align-left\">Mechanical resonators can be thought of as tiny clocks and amplifiers for motion, and their quality factor (Q) determines how long a vibration persists before dissipation erases it. Our goal is to engineer Q in resonant MEMS and NEMS by identifying the dominant loss mechanisms and then reducing, redirecting, or actively controlling them so that the same device becomes quieter, more stable, and more sensitive. In current practice, Q is often improved by vacuum packaging, low loss materials, and careful geometry, yet performance still hits limits from energy leakage into supports (clamping or anchor loss), surface related dissipation, and, in ultrathin 2D devices, adsorption, air damping, and nonlinear damping. We go beyond passive optimization by combining mechanism level dissipation studies with active and structural Q control, including feedback based self sustaining oscillators and parametric pumping for linewidth and noise control, and stress engineering, trampoline style geometries, and phononic concepts that suppress leakage into supports. This approach works because we pair nanofabrication with precision measurement and multiscale modeling across multiple platforms, which lets us build loss budgets and apply targeted design rules instead of trial and error. The payoff is higher performance resonators for ultrasensitive sensing, timing and frequency references, compact RF signal processing, and hybrid classical and quantum transduction where controlled dissipation is essential.<\/p>\n<\/div><\/div>\n\n\n\n<div style=\"height:100px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>Featured Publications<\/strong>:<\/h3>\n\n\n\n<div style=\"height:50px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<div class=\"wp-block-group lab-news-item\"><div class=\"wp-block-group__inner-container is-layout-constrained wp-block-group-is-layout-constrained\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"2432\" height=\"2108\" src=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-117-1.png\" alt=\"\" class=\"wp-image-3207\" style=\"width:auto;height:300px\" srcset=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-117-1.png 2432w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-117-1-300x260.png 300w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-117-1-1024x888.png 1024w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-117-1-768x666.png 768w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-117-1-1536x1331.png 1536w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-117-1-2048x1775.png 2048w\" sizes=\"auto, (max-width: 2432px) 100vw, 2432px\" \/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\"><strong><a href=\"https:\/\/doi.org\/10.1002\/adfm.202511158\">Graphene Trampoline Nanomechanical Resonators with Very High Quality Factors and Broad Dynamic Ranges<\/a><\/strong><\/p>\n\n\n\n<p style=\"text-align: justify\">We demonstrated graphene nanomechanical trampoline resonators that offer very high Q at room temperature with broad dynamic ranges. A 6 tether trampoline design reaches f times Q products up to 4.1 times 10^11 Hz among 2D resonators. This work highlights geometry enabled reduction of loss and routes to high performance 2D resonant transducers.<\/p>\n<\/div><\/div>\n\n\n\n<div style=\"height:100px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<div class=\"wp-block-group lab-news-item\"><div class=\"wp-block-group__inner-container is-layout-constrained wp-block-group-is-layout-constrained\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"908\" height=\"1024\" src=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-120-908x1024.png\" alt=\"\" class=\"wp-image-3213\" style=\"width:auto;height:400px\" srcset=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-120-908x1024.png 908w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-120-266x300.png 266w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-120-768x866.png 768w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-120.png 1096w\" sizes=\"auto, (max-width: 908px) 100vw, 908px\" \/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\"><strong><a href=\"https:\/\/doi.org\/10.1016\/j.sna.2022.113678\">Thermal Piezoresistive Pumping on Double SiC Layer Resonator for Effective Quality Factor Tuning<\/a><\/strong><\/p>\n\n\n\n<p style=\"text-align: justify\">We introduced thermal piezoresistive pumping in a double SiC layer bridge resonator to actively tune effective Q. The device leverages piezoresistive coupling to feed mechanical vibration from a DC bias, yielding up to 15.5 percent enhancement in effective Q from 12,200 to 14,100, with a pumping threshold reached near 0.18 W.<\/p>\n<\/div><\/div>\n\n\n\n<div style=\"height:130px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<div class=\"wp-block-group lab-news-item\"><div class=\"wp-block-group__inner-container is-layout-constrained wp-block-group-is-layout-constrained\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"679\" src=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-119-1024x679.png\" alt=\"\" class=\"wp-image-3211\" style=\"width:auto;height:400px\" srcset=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-119-1024x679.png 1024w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-119-300x199.png 300w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-119-768x509.png 768w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-119.png 1424w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\"><strong><a href=\"https:\/\/doi.org\/10.1021\/acs.nanolett.2c02629\">Nonlinear Stiffness and Nonlinear Damping in Atomically Thin MoS2 Nanomechanical Resonators<\/a><\/strong><\/p>\n\n\n\n<p style=\"text-align: justify\">We reported quantitative measurements of nonlinear damping and nonlinear stiffness in single layer and few layer MoS2 resonators, including higher order damping and frequency detuning effects. This work establishes nonlinear dissipation as a critical design constraint for high drive operation, parametric control, and low noise 2D resonant transducers.<\/p>\n<\/div><\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<div class=\"wp-block-group lab-news-item\"><div class=\"wp-block-group__inner-container is-layout-constrained wp-block-group-is-layout-constrained\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"529\" src=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-118-1024x529.png\" alt=\"\" class=\"wp-image-3209\" style=\"width:auto;height:300px\" srcset=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-118-1024x529.png 1024w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-118-300x155.png 300w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-118-768x397.png 768w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-118-1536x794.png 1536w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-118.png 1804w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\"><strong><a href=\"https:\/\/doi.org\/10.1002\/adfm.202415708\">Temperature Compensated Graphene Nanomechanical Resonators<\/a><\/strong><\/p>\n\n\n\n<p style=\"text-align: justify\">We demonstrated temperature compensated bilayer graphene resonators operating from 300 to 480 K. By engineering the device and clamp response, we achieved linear temperature coefficients of frequency on the order of minus 39 and minus 84 ppm per K, enabling improved frequency stability for sensing and reference applications.<\/p>\n<\/div><\/div>\n\n\n\n<div style=\"height:130px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<div class=\"wp-block-group lab-news-item\"><div class=\"wp-block-group__inner-container is-layout-constrained wp-block-group-is-layout-constrained\"><div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"531\" src=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-121-1024x531.png\" alt=\"\" class=\"wp-image-3215\" style=\"width:auto;height:400px\" srcset=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-121-1024x531.png 1024w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-121-300x156.png 300w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-121-768x398.png 768w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-121-1536x796.png 1536w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-121.png 1744w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div>\n\n\n<p class=\"has-text-align-center\"><strong><a href=\"https:\/\/doi.org\/10.1021\/acsami.2c08414\">High Quality Factors in Superlattice Ferroelectric Hf0.5Zr0.5O2 Nanoelectromechanical Resonators<\/a><\/strong><\/p>\n\n\n\n<p style=\"text-align: justify\">We demonstrated integrated high Q ferroelectric NEMS resonators based on atomic layered hafnia zirconia superlattices. The devices reach quality factors up to 171,000 and frequency quality factor products above 10^11 Hz at room temperature in vacuum. The analysis points to clamping loss and surface loss as key limiting mechanisms and outlines directions to push f times Q further.<\/p>\n<\/div><\/div>\n\n\n\n<div style=\"height:100px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<div class=\"wp-block-group lab-news-item\"><div class=\"wp-block-group__inner-container is-layout-constrained wp-block-group-is-layout-constrained\">\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"259\" src=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-122-1024x259.png\" alt=\"\" class=\"wp-image-3217\" style=\"object-fit:cover\" srcset=\"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-122-1024x259.png 1024w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-122-300x76.png 300w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-122-768x195.png 768w, https:\/\/faculty.eng.ufl.edu\/quanta\/wp-content\/uploads\/sites\/679\/2026\/03\/Group-122.png 1184w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p class=\"has-text-align-center\"><strong><a href=\"https:\/\/doi.org\/10.1109\/JMEMS.2024.3515098\">Single Crystal Silicon Thermal Piezoresistive Resonators as High Stability Frequency References<\/a><\/strong><\/p>\n\n\n\n<p style=\"text-align: justify\">We reported single crystal silicon thermal piezoresistive resonators achieving about 0.2 ppb level frequency stability. With DC power feedback, the Allan deviation reaches about 0.236 ppb at an averaging time near 1.2 s, supporting integrated strategies for resonant frequency references.<\/p>\n<\/div><\/div>\n<\/div>\n<\/div>\n\n\n\n<h3 class=\"wp-block-heading\"><strong>References:<\/strong><\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Huang XMH,\u00a0<strong>Feng XL<\/strong>, Prakash MK, Kumar S, Zorman CA,\u00a0Mehregany\u00a0M,\u00a0Roukes\u00a0ML, \u201cFabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates\u201d,\u00a0<em>Materials Science Forum<\/em>\u00a0<strong>457-460<\/strong>, 1531-1534 (2004).\u00a0\u00a0[This is the\u00a0<em>Proceedings of\u00a0The\u00a02004 International Conference on Silicon Carbide and Related Materials<\/em>\u00a0(<em>ICSCRM 2003<\/em>), Lyon, France, October 5-10 (2003)].\u00a0DOI:\u00a0<a href=\"https:\/\/doi.org\/10.4028\/www.scientific.net\/MSF.457-460.1531\" target=\"_blank\" rel=\"noreferrer noopener\">https:\/\/doi.org\/10.4028\/www.scientific.net\/MSF.457-460.1531\u00a0<\/a>\u00a0\u00a0<\/li>\n\n\n\n<li><strong>Feng XL<\/strong>, Zorman CA,\u00a0Mehregany\u00a0M,\u00a0Roukes\u00a0ML, \u201cDissipation in Single-Crystal 3C-SiC UHF Nanomechanical Resonators\u201d,\u00a0<em>Digest of Technical Papers<\/em>,\u00a0<em>The 12<sup>th<\/sup>\u00a0Solid-State Sensors, Actuators, and Microsystems Workshop<\/em>\u00a0(<em>Hilton Head\u201906<\/em>), 86-89, Hilton Head Island, SC, June 4-8 (2006).\u00a0(+talk, selection rate 8.9%).\u00a0DOI:\u00a0<a href=\"https:\/\/doi.org\/10.48550\/arXiv.cond-mat\/0606711\" target=\"_blank\" rel=\"noreferrer noopener\">https:\/\/doi.org\/10.48550\/arXiv.cond-mat\/0606711\u00a0<\/a>\u00a0\u00a0<\/li>\n\n\n\n<li><strong>Feng XL<\/strong>, He RR, Yang PD,\u00a0Roukes\u00a0ML, \u201cPhase Noise and Frequency Stability of Very-High Frequency Silicon Nanowire Nanomechanical Resonators\u201d,\u00a0<em>Digest of Technical Papers,\u00a0The 14<sup>th<\/sup>\u00a0International Conference on Solid-State Sensors, Actuators, and Microsystems\u00a0<\/em>(<em>Transducers\u201907<\/em>), 327-330, Lyon, France, June 10-14 (2007). (+talk, selection rate 13.5%).\u00a0DOI:\u00a0<a href=\"https:\/\/doi.org\/10.1109\/SENSOR.2007.4300134\" target=\"_blank\" rel=\"noreferrer noopener\">https:\/\/doi.org\/10.1109\/SENSOR.2007.4300134<\/a><\/li>\n\n\n\n<li><span style=\"text-decoration: underline\">Lee J<\/span>, Zhao L, Chiu HY, Shan J,\u00a0<strong>Feng PXL<\/strong><sup>*<\/sup>, \u201cTemperature Compensation of Graphene Nanomechanical Resonators\u201d,\u00a0<em>Advanced Functional Materials<\/em>\u00a0<strong>35<\/strong>, 2415708 (2025).\u00a0\u00a0DOI:\u00a0<a href=\"https:\/\/doi.org\/10.1002\/adfm.202415708\" target=\"_blank\" rel=\"noreferrer noopener\">https:\/\/doi.org\/10.1002\/adfm.202415708<\/a>\u00a0\u00a0<\/li>\n\n\n\n<li>[<em>Frontispiece Article<\/em>]\u00a0<span style=\"text-decoration: underline\">Yousuf SMEH<\/span>,\u00a0<span style=\"text-decoration: underline\">Wang Y<\/span>, Rudawski NG,\u00a0<strong>Feng PXL<\/strong><sup>*<\/sup>, \u201cGraphene Trampoline Nanomechanical Resonators with Very\u00a0High Quality\u00a0Factors and Broad Dynamic Ranges\u201d,\u00a0<em>Advanced Functional Materials<\/em>\u00a0<strong>35<\/strong>, e11158 (2025).\u00a0\u00a0DOI:\u00a0<a href=\"https:\/\/doi.org\/10.1002\/adfm.202511158\" target=\"_blank\" rel=\"noreferrer noopener\">https:\/\/doi.org\/10.1002\/adfm.202511158<\/a>.\u00a0<\/li>\n\n\n\n<li>Guzman P, Dinh T, Qamar A,\u00a0<span style=\"text-decoration: underline\">Lee J<\/span>,\u00a0<span style=\"text-decoration: underline\">Zheng XQ<\/span>,\u00a0<strong>Feng PXL<\/strong>, Rais-Zadeh M, Phan HP, Nguyen T,\u00a0Foisal\u00a0ARM, Li H, Nguyen NT, Dao DV, \u201cThermal-Piezoresistive Pumping on Double\u00a0SiC\u00a0Layer Resonator for Effective Quality Factor Tuning\u201d,\u00a0<em>Sensors and Actuators A: Physical\u00a0<\/em><strong>343<\/strong>, 113678 (2022).\u00a0DOI:\u00a0<a href=\"https:\/\/doi.org\/10.1016\/j.sna.2022.113678\" target=\"_blank\" rel=\"noreferrer noopener\">https:\/\/doi.org\/10.1016\/j.sna.2022.113678<\/a><\/li>\n\n\n\n<li><span style=\"text-decoration: underline\">Zheng XQ<\/span>, Tharpe T, <span style=\"text-decoration: underline\">Yousuf SMEH<\/span>,\u00a0<strong>Feng PXL<\/strong>,\u00a0Tabrizian\u00a0R<sup>*<\/sup>, \u201cHigh Quality Factors in Superlattice Ferroelectric Hf<sub>0.5<\/sub>Zr<sub>0.5<\/sub>O<sub>2<\/sub>\u00a0Nanoelectromechanical Resonators\u201d,\u00a0<em>ACS Applied Materials &amp; Interfaces\u00a0<\/em><strong>14<\/strong>, 36807-36814 (2022).\u00a0\u00a0DOI:\u00a0<a href=\"https:\/\/doi.org\/10.1021\/acsami.2c08414\" target=\"_blank\" rel=\"noreferrer noopener\">https:\/\/doi.org\/10.1021\/acsami.2c08414<\/a>\u00a0<\/li>\n\n\n\n<li><span style=\"text-decoration: underline\">Kaisar T,<\/span>\u00a0<span style=\"text-decoration: underline\">Lee J<\/span>, Li D, Shaw SW,\u00a0<strong>Feng PXL<\/strong><sup>*<\/sup>, \u201cNonlinear Stiffness and Nonlinear Damping in Atomically Thin MoS<sub>2<\/sub>\u00a0Nanomechanical Resonators\u201d,\u00a0<em>Nano Letters\u00a0<\/em><strong>22<\/strong>, 9831-9838 (2022). DOI:\u00a0<a href=\"https:\/\/doi.org\/10.1021\/acs.nanolett.2c02629\" target=\"_blank\" rel=\"noreferrer noopener\">https:\/\/doi.org\/10.1021\/acs.nanolett.2c02629<\/a><\/li>\n\n\n\n<li><span style=\"text-decoration: underline\">Watkins CA<\/span>,\u00a0Lee J, McCandless JP, Hall HJ,\u00a0<strong>Feng PXL<\/strong><sup>*<\/sup>, \u201cSingle-Crystal Silicon Thermal-Piezoresistive Resonators as High-Stability Frequency References\u201d,\u00a0<em>Journal of Microelectromechanical Systems<\/em>\u00a0<strong>34<\/strong>, 15-23 (2025).\u00a0\u00a0DOI:\u00a0<a href=\"https:\/\/doi.org\/10.1109\/JMEMS.2024.3515098\" target=\"_blank\" rel=\"noreferrer noopener\">https:\/\/doi.org\/10.1109\/JMEMS.2024.3515098<\/a>\u00a0<\/li>\n\n\n\n<li><span style=\"text-decoration: underline\">Liu Y<\/span>, Sun W, Abiri H,\u00a0<strong>Feng PXL<\/strong><sup>*<\/sup>, Li Q, \u201cUltracompact 4H-Silicon Carbide Optomechanical Resonator\u00a0with\u00a0<em>f<\/em><sub>m<\/sub><em>Q<\/em><sub>m<\/sub>\u00a0Exceeding 10\u00b9\u00b3 Hz\u201d,\u00a0<em>Photonics Research<\/em>\u00a0<strong>13<\/strong>, 2531-2538 (2025).\u00a0DOI:\u00a0<a href=\"https:\/\/doi.org\/10.1364\/PRJ.567674\" target=\"_blank\" rel=\"noreferrer noopener\">https:\/\/doi.org\/10.1364\/PRJ.567674<\/a>.<\/li>\n<\/ul>\n\n\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Overview Mechanical resonators can be thought of as tiny clocks and amplifiers for motion, and their quality factor (Q) determines how long a vibration persists before dissipation erases it. Our goal is to engineer Q in resonant MEMS and NEMS by identifying the dominant loss mechanisms and then reducing, redirecting, or actively controlling them so [&hellip;]<\/p>\n","protected":false},"author":1399,"featured_media":0,"parent":9,"menu_order":3,"comment_status":"closed","ping_status":"closed","template":"page-templates\/page-section-nav.php","meta":{"_acf_changed":false,"inline_featured_image":false,"featured_post":"","footnotes":"","_links_to":"","_links_to_target":""},"class_list":["post-2013","page","type-page","status-publish","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-json\/wp\/v2\/pages\/2013","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-json\/wp\/v2\/users\/1399"}],"replies":[{"embeddable":true,"href":"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-json\/wp\/v2\/comments?post=2013"}],"version-history":[{"count":20,"href":"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-json\/wp\/v2\/pages\/2013\/revisions"}],"predecessor-version":[{"id":3229,"href":"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-json\/wp\/v2\/pages\/2013\/revisions\/3229"}],"up":[{"embeddable":true,"href":"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-json\/wp\/v2\/pages\/9"}],"wp:attachment":[{"href":"https:\/\/faculty.eng.ufl.edu\/quanta\/wp-json\/wp\/v2\/media?parent=2013"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}